PLASUS
- Plasma diagnostic/ Parameter measurement system
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EMICON system, the plasma spectroscopy monitor system, is capable of monitoring plasma emission intensity, density of ion and electron, spectrometer profile, spectral element, and plasma species within plasma light emission from 200 to 1100nm.
Up to 8- channel-simultaneous process controls are available.
SpecLine, automatic plasma emission spectral analysis and line identification software, identifies atoms, molecules, and ions instantly through approx. 600 thousand kinds of database search.
PLASUS EMICON systems are now utilized in many plasma process control sites.
| EMICON Type | Spectrometer Channels | Spectral range | Spectral Resolution | Features |
|---|---|---|---|---|
| MC series | 1～8 | 200~1100nm | Approx 1.4nmFWHM | |
| HR series | 1～2 | 200~860nm | Approx 0.15nmFWHM | |
| SA series | 1～8 | 200~1100nm | Approx 1.4nmFWHM | Built-in PC, Touch screen |