Products Plasma Measurement Devices
|Substrate ion interactions
|Ion energy and ion flux / Ion angular distribution /
Ion neutral fraction / Ion mass and energy
|Bulk plasma parameters
|Plasma parameter characteristic /Process compatible plasma /
Magnetic field of RF plasma
|Power delivery plasma measurement
|Multi-frequency in-line RF voltage,
current, phase, impedance and harmonic measurement /
Multi-frequency RF system with plasma diagnostic and complex waveform analysis /
In-line RF power /In-line RF voltage, current, phase
|RF amplitude, RF event
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