Impedans
- Plasma diagnostic/ Parameter measurement system
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Having a concept “Plasma measurement to understand and control the future”, Impedans delivers measurement instruments specialized in plasma diagnostic measurement.
Impedans’ plasma measurement devices contribute to not only the conventional plasma measurement but also the measurement of atmospheric pressure plasma, HiPIMS plasma, space plasma, and ion energy distribution
| Application | Measures | Standard model |
|---|---|---|
| Substrate ion interactions | Ion energy and ion flux / Ion angular distribution / Ion neutral fraction / Ion mass and energy |
4 |
| Bulk plasma parameters | Plasma parameter characteristic /Process compatible plasma / Magnetic field of RF plasma |
3 |
| Power delivery plasma measurement | Multi-frequency in-line RF voltage, current, phase, impedance and harmonic measurement / Multi-frequency RF system with plasma diagnostic and complex waveform analysis / In-line RF power /In-line RF voltage, current, phase |
3 |
| Micro-Arc detection | RF amplitude, RF event |
