Products Power Supply for Plasma

Unipolar/Bipolar pulse sputtering power supply


Unipolar/Bipolar pulse sputtering power supply
MAGPULS large current pulsed-DC sputtering power supply features the most advanced technology that is optimally utilized in: plasma ion nitriding process, new deposition technology using glow discharge by high power pulse magnetron sputtering method (HiPIMS/HPPMS), reactive sputtering, and pretreatment process before the deposition.
Series Type Application Output power Peak current Standard model
MP1 Unipolar power supply Single magnetron sputtering,
Plasma nitriding, PVD bias
MP2 Bipolar MF power supply Dual magnetron sputtering,
Cleaning, Activation
MP2-AS Asymmetric bipolar power supply Single/Dual magnetron sputtering,
PVD bias
MP2-HC HiPIMS power supply Single/Dual magnetron sputtering,
Superpositioning HiPIMS+MF
Sputtering DC power supply

AE (Advanced Energy)

Sputtering DC power supply
Advanced Energy offers sputtering DC power supplies that have achieved the industry’s lowest stored energy, the fastest arc suppression time, and the widest range of impedance at full rated power.
Type Output Features
Pinnacle® 6kW, 10kW, 12kW, 20kW,
6kW Dual, 10kW Dual
The fastest arc response / the lowest stored energy in the industry
The widest impedance range in full-power operation
Ascent® 30kW, 40kW, 60kW Most advanced Arc Management System™ technology
Solvix® 3~40kW A wide range of power and frequency level and multiple communication options
MDX 500W, 1kW, 1.5kW Superior arc suppression Low stored output energy
Sputtering pulsed-DC power supply
Sputtering pulsed-DC power supply
Advanced Energy offers sputtering pulsed-DC power supply that enables higher deposition rate with excellent repeatability and provides high quality film through exceptional Arc Management System technology.
Type Output Frequency
Pinnacle® Plus+ 5kW, 5kW Dual, 10kW, HALO 5~350 kHz
Solvix® Arc/Bias 3kW, 6kW, 10kW, 15kW, 30kW 1~200 Hz (Arc)
1~350 kHz (Bias)
Ascent® AMS 30kW, 40kW, 60kW -
Ascent® AMS
⇒Ascent® DMS Accessory
40kW, 60kW, 120kW 500 Hz~50 kHz

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